Inventor
AOKI KIMIYA
JP8 patents
⚠️ This page may combine multiple inventors who share the name “AOKI KIMIYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS6869892B1Mar 22, 2005
Method of oxidizing work pieces and oxidation system
TOKYO ELECTRON LTD43 citations90
US7304003B2Dec 4, 2007
Oxidizing method and oxidizing unit for object to be processed
TOKYO ELECTRON LTD11 citations83
US7700156B2Apr 20, 2010
Method and apparatus for forming silicon oxide film
TOKYO ELECTRON LTD10 citations81
US6245673B1Jun 12, 2001
Method of forming tungsten silicide film
TOKYO ELECTRON LTD7 citations73
US7926445B2Apr 19, 2011
Oxidizing method and oxidizing unit for object to be processed
TOKYO ELECTRON LTD2 citations62
US7563481B2Jul 21, 2009
Method and apparatus for processing polysilazane film
TOKYO ELECTRON LTD2 citations62
US7064084B2Jun 20, 2006
Oxide film forming method
TOKYO ELECTRON LTD4 citations62