Inventor
SICHLER STEFFEN
DE3 patents
Patents
3 patentsUS9633857B1Apr 25, 2017
Semiconductor structure including a trench capping layer and method for the formation thereof
GLOBALFOUNDRIES INC3 citations68
US10103224B2Oct 16, 2018
Semiconductor structure including a trench capping layer
GLOBALFOUNDRIES INC0 citations47
US9876111B2Jan 23, 2018
Method of forming a semiconductor device structure using differing spacer widths and the resulting semiconductor device structure
GLOBALFOUNDRIES INC0 citations36