Inventor
VAN DE KERHOF MARCUS ADRIANUS
NL4 patents
⚠️ This page may combine multiple inventors who share the name “VAN DE KERHOF MARCUS ADRIANUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
3 patentsUS7282701B2Oct 16, 2007
Sensor for use in a lithographic apparatus
ASML NETHERLANDS BV12 citations81
US7453078B2Nov 18, 2008
Sensor for use in a lithographic apparatus
ASML NETHERLANDS BV8 citations71
US6906787B2Jun 14, 2005
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV4 citations57