Inventor

MAO ZHIGANG

US3 patents

⚠️ This page may combine multiple inventors who share the name “MAO ZHIGANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US10199224B2Feb 5, 2019

Method for improving CD micro-loading in photomask plasma etching

APPLIED MATERIALS INC0 citations49

US9425062B2Aug 23, 2016

Method for improving CD micro-loading in photomask plasma etching

APPLIED MATERIALS INC0 citations49

LAM RES CORP

1 patent

US7208420B1Apr 24, 2007

Method for selectively etching an aluminum containing layer

LAM RES CORP3 citations57