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Inventor
MAYNARD HELEN L
US
9 patents
⚠️ This page may combine multiple inventors who share the name “MAYNARD HELEN L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PAPASOULIOTIS GEORGE D
2 patents
US9123509B2
Sep 1, 2015
Techniques for plasma processing a substrate
PAPASOULIOTIS GEORGE D
39 citations
92
US8679960B2
Mar 25, 2014
Technique for processing a substrate having a non-planar surface
PAPASOULIOTIS GEORGE D
3 citations
61
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
2 patents
US10460941B2
Oct 29, 2019
Plasma doping using a solid dopant source
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
0 citations
51
US9437432B1
Sep 6, 2016
Self-compensating oxide layer
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
0 citations
49
LAM RES CORP
1 patent
US6255221B1
Jul 3, 2001
Methods for running a high density plasma etcher to achieve reduced transistor device damage
LAM RES CORP
369 citations
98
BATEMAN NICHOLAS P T
1 patent
US8465909B2
Jun 18, 2013
Self-aligned masking for solar cell manufacture
BATEMAN NICHOLAS P T
2 citations
60
IBM
1 patent
US7279426B2
Oct 9, 2007
Like integrated circuit devices with different depth
IBM
3 citations
57
SINCLAIR FRANK
1 patent
US9093104B2
Jul 28, 2015
Technique for manufacturing bit patterned media
SINCLAIR FRANK
0 citations
50
MAYNARD HELEN L
1 patent
US8124487B2
Feb 28, 2012
Method for enhancing tensile stress and source/drain activation using Si:C
MAYNARD HELEN L
2 citations
50