Inventor
IZUMOTO KENJI
JP4 patents
Patents
4 patentsUS10755951B2Aug 25, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD2 citations69
US10002770B2Jun 19, 2018
Substrate processing device and substrate processing method for carrying out chemical treatment for substrate
SCREEN HOLDINGS CO LTD3 citations69
US11217452B2Jan 4, 2022
Substrate processing device and substrate processing method for carrying out chemical treatment for substrate
SCREEN HOLDINGS CO LTD1 citations58
US9997382B2Jun 12, 2018
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations48