Inventor
HIGASHI KOUDAI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “HIGASHI KOUDAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS11402313B2Aug 2, 2022
Foreign substance detection device and foreign substance detection method
TOKYO ELECTRON LTD2 citations71
US10049905B2Aug 14, 2018
Substrate heat treatment apparatus, substrate heat treatment method, storage medium and heat-treatment-condition detecting apparatus
TOKYO ELECTRON LTD2 citations66
US11906414B2Feb 20, 2024
Foreign substance detection device and foreign substance detection method
TOKYO ELECTRON LTD0 citations61
US11879839B2Jan 23, 2024
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations61
US11340152B2May 24, 2022
Substrate processing apparatus, substrate processing system, and substrate processing method
TOKYO ELECTRON LTD0 citations61
US11002656B2May 11, 2021
Substrate processing apparatus, substrate processing system, and substrate processing method
TOKYO ELECTRON LTD0 citations61
US11048016B2Jun 29, 2021
Foreign substance detection device, foreign substance detection method and recording medium
TOKYO ELECTRON LTD0 citations50
US12431374B2Sep 30, 2025
Information acquisition system and information acquisition method
TOKYO ELECTRON LTD0 citations47
US9953853B2Apr 24, 2018
Substrate transport apparatus
TOKYO ELECTRON LTD0 citations40