Inventor

HAN PETER BYUNG H

KR3 patents

Patents

3 patents

US10964511B2Mar 30, 2021

Semiconductor manufacturing device and method of operating the same

SAMSUNG ELECTRONICS CO LTD2 citations67

US12437969B2Oct 7, 2025

Plasma processing equipment

SAMSUNG ELECTRONICS CO LTD0 citations58

US11501953B2Nov 15, 2022

Plasma processing equipment

SAMSUNG ELECTRONICS CO LTD0 citations58