Inventor
LEE EUIBOK
KR6 patents
Patents
6 patentsUS12451421B2Oct 21, 2025
Semiconductor device with double etch stop layer and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD1 citations60
US12014951B2Jun 18, 2024
Semi-damascene structure with dielectric hardmask layer
SAMSUNG ELECTRONICS CO LTD0 citations57
US12021027B2Jun 25, 2024
Integrated circuit device having parallel conductive lines with bulging end portion(s) and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations48
US12444675B2Oct 14, 2025
Semiconductor devices
SAMSUNG ELECTRONICS CO LTD0 citations47
US11488864B2Nov 1, 2022
Self-aligned supervia and metal direct etching process to manufacture self-aligned supervia
SAMSUNG ELECTRONICS CO LTD0 citations47
US9171755B2Oct 27, 2015
Methods of manufacturing semiconductor devices including capped metal patterns with air gaps in-between for parasitic capacitance reduction
SAMSUNG ELECTRONICS CO LTD0 citations47