Inventor
AHN DONG OK
KR5 patents
Patents
5 patentsUS11756815B2Sep 12, 2023
Apparatus for and method of monitoring warpage of substrate, substrate treatment apparatus, and substrate-type sensor
SEMES CO LTD4 citations70
US11577506B2Feb 14, 2023
Apparatus and method for inspecting droplet
SEMES CO LTD0 citations60
US11703520B2Jul 18, 2023
Wafer type sensor unit and data acquisition method using the wafer type sensor unit
SEMES CO LTD0 citations59
US12317419B2May 27, 2025
Apparatus for temperature measurement and method of processing substrate
SEMES CO LTD0 citations48
US12560430B2Feb 24, 2026
Level sensor module and portable level measuring apparatus
SEMES CO LTD0 citations47