Inventor

WEICHART JOHANNES

LI3 patents

Patents

3 patents

US11217434B2Jan 4, 2022

RF capacitive coupled dual frequency etch reactor

EVATEC AG2 citations67

US11742187B2Aug 29, 2023

RF capacitive coupled etch reactor

EVATEC AG0 citations57

US11469085B2Oct 11, 2022

Vacuum plasma workpiece treatment apparatus

EVATEC AG0 citations57