Inventor
YI CHING-LIANG
TW6 patents
⚠️ This page may combine multiple inventors who share the name “YI CHING-LIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SKY TECH INC
5 patentsUS11401608B2Aug 2, 2022
Atomic layer deposition equipment and process method
SKY TECH INC2 citations63
US12006571B2Jun 11, 2024
Atomic layer deposition apparatus for coating on fine powders
SKY TECH INC0 citations49
US12421600B2Sep 23, 2025
2-in-1 (UV-assisted and plasma enhanced) ALD and ALE chamber
SKY TECH INC0 citations48
US11535938B2Dec 27, 2022
Shower head assembly and atomic layer deposition device
SKY TECH INC0 citations45
US12224159B1Feb 11, 2025
Gas mixing method to enhance plasma
SKY TECH INC0 citations44