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Inventor
BIELI GIAMPIETRO
US
4 patents
⚠️ This page may combine multiple inventors who share the name “BIELI GIAMPIETRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA CORP
3 patents
US12370581B2
Jul 29, 2025
In-situ process chamber chuck cleaning by cleaning substrate
KLA CORP
0 citations
56
US11638938B2
May 2, 2023
In situ process chamber chuck cleaning by cleaning substrate
KLA CORP
0 citations
56
US11607716B1
Mar 21, 2023
Systems and methods for chuck cleaning
KLA CORP
0 citations
56
KLA TENCOR CORP
1 patent
US11056366B2
Jul 6, 2021
Sample transport device with integrated metrology
KLA TENCOR CORP
0 citations
50