Inventor
YUN YOUNG UN
KR4 patents
Patents
4 patentsUS12429042B2Sep 30, 2025
Torsion pump and chemical liquid supply unit
SEMES CO LTD0 citations59
US12331736B2Jun 17, 2025
Pump, chemical liquid supplying unit, and substrate treating apparatus
SEMES CO LTD0 citations59
US12500096B2Dec 16, 2025
Apparatus for inspecting droplet and substrate processing apparatus including the same
SEMES CO LTD0 citations48
US12487530B2Dec 2, 2025
Method and apparatus for treating substrate, and temperature control method
SEMES CO LTD0 citations46