Inventor
LO Chia-Chiung
TW6 patents
Patents
6 patentsUS9881821B2Jan 30, 2018
Control wafer making device and method for measuring and monitoring control wafer
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71
US10144109B2Dec 4, 2018
Polisher, polishing tool, and polishing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10043691B2Aug 7, 2018
Control wafer making device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US9721826B1Aug 1, 2017
Wafer supporting structure, and device and method for manufacturing semiconductor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45
US10103262B2Oct 16, 2018
Method of forming a finFET structure with high quality EPI film
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations39
US10109467B2Oct 23, 2018
Advanced exhaust system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations38