Inventor
KUEGLER EDUARD
AT15 patents
⚠️ This page may combine multiple inventors who share the name “KUEGLER EDUARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BALZERS HOCHVAKUUM
8 patentsUS5423970AJun 13, 1995
Apparatus for reactive sputter coating at least one article
BALZERS HOCHVAKUUM53 citations95
US5292417AMar 8, 1994
Method for reactive sputter coating at least one article
BALZERS HOCHVAKUUM64 citations95
US6176979B1Jan 23, 2001
Method of manufacturing an object in a vacuum recipient
BALZERS HOCHVAKUUM19 citations92
US6068742AMay 30, 2000
Target arrangement with a circular plate, magnetron for mounting the target arrangement, and process for coating a series of circular disc-shaped workpieces by means of said magnetron source
BALZERS HOCHVAKUUM35 citations92
US5622606AApr 22, 1997
Gas inlet arrangement
BALZERS HOCHVAKUUM93 citations92
US6149783ANov 21, 2000
Vacuum treatment apparatus
BALZERS HOCHVAKUUM6 citations73
US5965228AOct 12, 1999
Information carrier, method for producing same
BALZERS HOCHVAKUUM8 citations73
US5408489AApr 18, 1995
Optical layer for excimer laser
BALZERS HOCHVAKUUM10 citations70
OC OERLIKON BALZERS AG
3 patentsUS7138343B2Nov 21, 2006
Method of producing a substrate with a surface treated by a vacuum treatment process, use of said method for the production of coated workpieces and plasma treatment chamber
OC OERLIKON BALZERS AG7 citations69
US7718042B2May 18, 2010
Method for manufacturing sputter-coated substrates, magnetron source and sputtering chamber with such source
OC OERLIKON BALZERS AG4 citations62
US7429543B2Sep 30, 2008
Method for the production of a substrate
OC OERLIKON BALZERS AG0 citations48