Inventor

KINOSHITA DAINICHIRO

JP4 patents

Patents

4 patents

US5337140AAug 9, 1994

Optical detecting system wtih self-correction

HORIBA LTD29 citations90

US5321495AJun 14, 1994

Optical detecting system for determining particle position on a substrate

HORIBA LTD14 citations72

US5796475AAug 18, 1998

Signal process method and apparatus for defect inspection

HORIBA LTD5 citations58

US4437058AMar 13, 1984

Indicating means for measuring instrument

HORIBA LTD3 citations58