Inventor
KIM YANG-HYONG
KR3 patents
Patents
3 patentsUS6525318B1Feb 25, 2003
Methods of inspecting integrated circuit substrates using electron beams
SAMSUNG ELECTRONICS CO LTD19 citations86
US6545491B2Apr 8, 2003
Apparatus for detecting defects in semiconductor devices and methods of using the same
SAMSUNG ELECTRONICS CO LTD11 citations70
US6100102AAug 8, 2000
Method of in-line monitoring for shallow pit on semiconductor substrate
SAMSUNG ELECTRONICS CO LTD0 citations44