Inventor
KANG HYO-CHEON
KR7 patents
Patents
7 patentsUS6525318B1Feb 25, 2003
Methods of inspecting integrated circuit substrates using electron beams
SAMSUNG ELECTRONICS CO LTD19 citations86
US6913939B2Jul 5, 2005
Method for inspecting a wafer and apparatus for inspecting a wafer
SAMSUNG ELECTRONICS CO LTD6 citations70
US6545491B2Apr 8, 2003
Apparatus for detecting defects in semiconductor devices and methods of using the same
SAMSUNG ELECTRONICS CO LTD11 citations70
US7398178B2Jul 8, 2008
Method of determining the irregularities of a hole
SAMSUNG ELECTRONICS CO LTD2 citations59
US7126357B2Oct 24, 2006
Method for inspecting a wafer and apparatus for inspecting a wafer
SAMSUNG ELECTRONICS CO LTD4 citations59
US9165354B2Oct 20, 2015
Method of analyzing photolithography processes
SAMSUNG ELECTRONICS CO LTD0 citations48
US6100102AAug 8, 2000
Method of in-line monitoring for shallow pit on semiconductor substrate
SAMSUNG ELECTRONICS CO LTD0 citations44