Inventor
MORITZ HEIKO D
US4 patents
Patents
4 patentsUS6334266B1Jan 1, 2002
Supercritical fluid drying system and method of use
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US6612317B2Sep 2, 2003
Supercritical fluid delivery and recovery system for semiconductor wafer processing
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US6497239B2Dec 24, 2002
Inverted pressure vessel with shielded closure mechanism
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US6602349B2Aug 5, 2003
Supercritical fluid cleaning process for precision surfaces
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