Inventor

MOUNT DAVID J

US4 patents

⚠️ This page may combine multiple inventors who share the name “MOUNT DAVID J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

S C FLUIDS INC

3 patents

US6612317B2Sep 2, 2003

Supercritical fluid delivery and recovery system for semiconductor wafer processing

S C FLUIDS INC83 citations94

US6602349B2Aug 5, 2003

Supercritical fluid cleaning process for precision surfaces

S C FLUIDS INC39 citations88

US6935352B2Aug 30, 2005

Adding energy to a cleaning process fluid for removing photo resist, residues and particles from semiconductor substrates, photo masks, reticles, disks and flat-panel displays

S C FLUIDS INC0 citations47

POPE KEITH

1 patent

US7108001B2Sep 19, 2006

Method and apparatus for rotation of a workpiece in supercritical fluid solutions for removing photo resist, residues and particles therefrom

POPE KEITH3 citations47