Inventor

HEATHWAITE RICK M

US2 patents

Patents

2 patents

US6612317B2Sep 2, 2003

Supercritical fluid delivery and recovery system for semiconductor wafer processing

S C FLUIDS INC83 citations94

US6602349B2Aug 5, 2003

Supercritical fluid cleaning process for precision surfaces

S C FLUIDS INC39 citations88