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Inventor
RUCH VINCENT
FR
2 patents
⚠️ This page may combine multiple inventors who share the name “RUCH VINCENT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
RECIF INC
1 patent
US6880560B2
Apr 19, 2005
Substrate processing apparatus for processing substrates using dense phase gas and sonic waves
RECIF INC
26 citations
85
TECHSONIC SARL
1 patent
US7033068B2
Apr 25, 2006
Substrate processing apparatus for processing substrates using dense phase gas and sonic waves
TECHSONIC SARL
9 citations
65