Inventor

KOYAMA TOMOAKI

JP2 patents

Patents

2 patents

US8199454B2Jun 12, 2012

Electrostatic chuck and substrate temperature adjusting-fixing device

KOYAMA TOMOAKI82 citations91

US8068326B2Nov 29, 2011

Electrostatic chuck and substrate temperature control fixing apparatus

KOYAMA TOMOAKI0 citations45