Inventor

YALEI SUN

SG3 patents

Patents

3 patents

US8120304B2Feb 21, 2012

Method for improving motion times of a stage

YALEI SUN7 citations77

US8519728B2Aug 27, 2013

Compliance control methods and apparatuses

YALEI SUN3 citations56

US8310195B2Nov 13, 2012

Method for improving motion times of a stage

YALEI SUN0 citations45