Inventor

SHARPLESS LEONARD

US8 patents

⚠️ This page may combine multiple inventors who share the name “SHARPLESS LEONARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

4 patents

US7928366B2Apr 19, 2011

Methods of and apparatus for accessing a process chamber using a dual zone gas injector with improved optical access

LAM RES CORP7 citations81

US9490135B2Nov 8, 2016

Movable chamber liner plasma confinement screen combination for plasma processing apparatuses

LAM RES CORP4 citations71

US9689533B2Jun 27, 2017

Coating method for gas delivery system

LAM RES CORP0 citations49

US9687908B2Jun 27, 2017

Method of casting internal features

LAM RES CORP0 citations49

BROWN DANNY

2 patents

US8597462B2Dec 3, 2013

Movable chamber liner plasma confinement screen combination for plasma processing apparatuses

BROWN DANNY21 citations88

US8597428B2Dec 3, 2013

Vacuum sealing radio frequency (RF) and low frequency conducting actuator

BROWN DANNY0 citations37

KENWORTHY IAN

1 patent

US8852685B2Oct 7, 2014

Coating method for gas delivery system

KENWORTHY IAN11 citations77

BOGART JEFF A

1 patent

US8524099B2Sep 3, 2013

Methods for accessing a process chamber using a dual zone gas injector with improved optical access

BOGART JEFF A2 citations54