Inventor
KANG ZHIWEN
CN10 patents
⚠️ This page may combine multiple inventors who share the name “KANG ZHIWEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS11183360B2Nov 23, 2021
Optical system with compensation lens
ASML NETHERLANDS BV2 citations71
US12217927B2Feb 4, 2025
Beam manipulation of advanced charge controller module in a charged particle system
ASML NETHERLANDS BV0 citations62
US12072181B2Aug 27, 2024
Inspection apparatus and method
ASML NETHERLANDS BV0 citations62
US12392732B2Aug 19, 2025
Multi-source illumination unit and method of operating the same
ASML NETHERLANDS BV0 citations61
US11808930B2Nov 7, 2023
Optical objective lens
ASML NETHERLANDS BV0 citations61
US11682538B2Jun 20, 2023
Optical system with compensation lens
ASML NETHERLANDS BV0 citations61
US11521826B2Dec 6, 2022
Optical height detection system
ASML NETHERLANDS BV0 citations61
US12560556B2Feb 24, 2026
Method and system of sample edge detection and sample positioning for image inspection apparatus
ASML NETHERLANDS BV0 citations55
US12142456B2Nov 12, 2024
Self-differential confocal tilt sensor for measuring level variation in charged particle beam system
ASML NETHERLANDS BV0 citations49