Inventor
CHAO ROBIN H
US6 patents
Patents
6 patentsUS10243060B2Mar 26, 2019
Uniform low-k inner spacer module in gate-all-around (GAA) transistors
IBM13 citations83
US9978678B1May 22, 2018
Vertically integrated nanosheet fuse
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US10930793B2Feb 23, 2021
Bottom channel isolation in nanosheet transistors
IBM2 citations72
US10804410B2Oct 13, 2020
Bottom channel isolation in nanosheet transistors
IBM3 citations72
US10043748B1Aug 7, 2018
Vertically integrated nanosheet fuse
IBM1 citations61
US10319676B2Jun 11, 2019
Vertically integrated nanosheet fuse
IBM0 citations51