Inventor
MCKERROW ANDREW JOHN
US13 patents
⚠️ This page may combine multiple inventors who share the name “MCKERROW ANDREW JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
10 patentsUS10347547B2Jul 9, 2019
Suppressing interfacial reactions by varying the wafer temperature throughout deposition
LAM RES CORP401 citations98
US9824884B1Nov 21, 2017
Method for depositing metals free ald silicon nitride films using halide-based precursors
LAM RES CORP348 citations98
US10454029B2Oct 22, 2019
Method for reducing the wet etch rate of a sin film without damaging the underlying substrate
LAM RES CORP11 citations83
US9502255B2Nov 22, 2016
Low-k damage repair and pore sealing agents with photosensitive end groups
LAM RES CORP4 citations72
US11075127B2Jul 27, 2021
Suppressing interfacial reactions by varying the wafer temperature throughout deposition
LAM RES CORP0 citations62
US10319582B2Jun 11, 2019
Methods and apparatus for depositing silicon oxide on metal layers
LAM RES CORP1 citations62
US11832533B2Nov 28, 2023
Conformal damage-free encapsulation of chalcogenide materials
LAM RES CORP0 citations60
US11239420B2Feb 1, 2022
Conformal damage-free encapsulation of chalcogenide materials
LAM RES CORP1 citations60
US10020188B2Jul 10, 2018
Method for depositing ALD films using halide-based precursors
LAM RES CORP0 citations51
US10240236B2Mar 26, 2019
Clean resistant windows for ultraviolet thermal processing
LAM RES CORP0 citations40