Inventor

BRANDT DAVID C

US8 patents

⚠️ This page may combine multiple inventors who share the name “BRANDT DAVID C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CYMER INC

4 patents

US7872245B2Jan 18, 2011

Systems and methods for target material delivery in a laser produced plasma EUV light source

CYMER INC90 citations97

US7671349B2Mar 2, 2010

Laser produced plasma EUV light source

CYMER INC54 citations97

US7655925B2Feb 2, 2010

Gas management system for a laser-produced-plasma EUV light source

CYMER INC43 citations96

US7812329B2Oct 12, 2010

System managing gas flow between chambers of an extreme ultraviolet (EUV) photolithography apparatus

CYMER INC45 citations92

BYKANOV ALEXANDER N

1 patent

US8198615B2Jun 12, 2012

Gas management system for a laser-produced-plasma EUV light source

BYKANOV ALEXANDER N21 citations92

ASML NETHERLANDS BV

1 patent

US10635002B2Apr 28, 2020

Faceted EUV optical element

ASML NETHERLANDS BV5 citations84

Cymer LLC

1 patent

US9541840B2Jan 10, 2017

Faceted EUV optical element

Cymer LLC4 citations73

HANSSON BJORN A M

1 patent

US9713239B2Jul 18, 2017

Laser produced plasma EUV light source

HANSSON BJORN A M0 citations44