Inventor
ERIGUCHI KAZUTAKA
US5 patents
Patents
5 patentsUS10641708B2May 5, 2020
Method of evaluating semiconductor substrate and method of manufacturing semiconductor substrate
SUMCO CORP3 citations70
US11047800B2Jun 29, 2021
Method of evaluating carbon concentration of silicon sample, method of evaluating silicon wafer manufacturing process, method of manufacturing silicon wafer, method of manufacturing silicon single crystal ingot, silicon single crystal ingot and silicon wafer
SUMCO CORP3 citations65
US10935510B2Mar 2, 2021
Method of measuring carbon concentration of silicon sample, method of manufacturing silicon single crystal ingot, silicon single crystal ingot and silicon wafer
SUMCO CORP0 citations56
US9842779B2Dec 12, 2017
Method of evaluating metal contamination in semiconductor wafer and method of manufacturing semiconductor wafer
SUMCO CORP1 citations48
US10676840B2Jun 9, 2020
Method of evaluating manufacturing process of silicon material and manufacturing method of silicon material
SUMCO CORP0 citations36