Inventor
ZHENG LEIWU
US4 patents
Patents
4 patentsUS12468232B2Nov 11, 2025
Etch bias characterization and method of using the same
ASML NETHERLANDS BV0 citations59
US11675274B2Jun 13, 2023
Etch bias characterization and method of using the same
ASML NETHERLANDS BV1 citations59
US11614690B2Mar 28, 2023
Methods of tuning process models
ASML NETHERLANDS BV1 citations55
US12505524B2Dec 23, 2025
Method for training or using a process model for determining a pattern in a patterning process
ASML NETHERLANDS BV0 citations48