Inventor
SEO YONG-JUN
KR11 patents
⚠️ This page may combine multiple inventors who share the name “SEO YONG-JUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
10 patentsUS11756815B2Sep 12, 2023
Apparatus for and method of monitoring warpage of substrate, substrate treatment apparatus, and substrate-type sensor
SEMES CO LTD4 citations70
US11703520B2Jul 18, 2023
Wafer type sensor unit and data acquisition method using the wafer type sensor unit
SEMES CO LTD0 citations59
US11495467B2Nov 8, 2022
Method and apparatus for etching thin layer
SEMES CO LTD1 citations59
US11923219B2Mar 5, 2024
Apparatus for treating substrate
SEMES CO LTD0 citations58
US11933808B2Mar 19, 2024
Buffer unit and method for storaging substrate type sensor for measuring of horizontality of a substrate support member provided on a temperature varying atmosphere
SEMES CO LTD0 citations57
US12061097B2Aug 13, 2024
Substrate type sensor for measuring horizontality of substrate support member provided in atmosphere accompanied by temperature change, method for measuring horizontality of substrate support member by using the same, and non-transitory computer readable medium
SEMES CO LTD0 citations56
US12224189B2Feb 11, 2025
Substrate type sensor and method of measuring the impact point and the impact force of chemical
SEMES CO LTD0 citations54
US12317419B2May 27, 2025
Apparatus for temperature measurement and method of processing substrate
SEMES CO LTD0 citations48
US12560430B2Feb 24, 2026
Level sensor module and portable level measuring apparatus
SEMES CO LTD0 citations47
US12046466B2Jul 23, 2024
Method and apparatus for treating substrate
SEMES CO LTD0 citations46