Inventor
SUN SHAOPENG
US9 patents
Patents
9 patentsUS11035048B2Jun 15, 2021
Cobalt filling of interconnects
MACDERMID ENTHONE INC3 citations70
US11401618B2Aug 2, 2022
Cobalt filling of interconnects
MACDERMID ENTHONE INC0 citations59
US11434578B2Sep 6, 2022
Cobalt filling of interconnects in microelectronics
MACDERMID ENTHONE INC0 citations58
US10995417B2May 4, 2021
Cobalt filling of interconnects in microelectronics
MACDERMID ENTHONE INC0 citations58
US12157944B2Dec 3, 2024
Method and wet chemical compositions for diffusion barrier formation
MACDERMID ENTHONE INC0 citations56
US11846018B2Dec 19, 2023
Method and wet chemical compositions for diffusion barrier formation
MACDERMID ENTHONE INC0 citations56
US11807951B2Nov 7, 2023
Cobalt chemistry for smooth topology
MACDERMID ENTHONE INC0 citations55
US11230778B2Jan 25, 2022
Cobalt chemistry for smooth topology
MACDERMID ENTHONE INC0 citations55
US12270121B2Apr 8, 2025
Composition and method for fabrication of nickel interconnects
MACDERMID ENTHONE INC0 citations49