Inventor
TEITZEL ROBIN
US5 patents
⚠️ This page may combine multiple inventors who share the name “TEITZEL ROBIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
2 patentsUS6720565B2Apr 13, 2004
Real-time prediction of and correction of proximity resist heating in raster scan particle beam lithography
APPLIED MATERIALS INC60 citations94
US6373071B1Apr 16, 2002
Real-time prediction of proximity resist heating and correction of raster scan electron beam lithography
APPLIED MATERIALS INC32 citations91