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Inventor
DAUENHAUER DENNIS A
US
2 patents
Patents
2 patents
US5178016A
Jan 12, 1993
Silicon pressure sensor chip with a shear element on a sculptured diaphragm
SENSYM INC
104 citations
93
US5132658A
Jul 21, 1992
Micromachined silicon potentiometer responsive to pressure
SENSYM INC
49 citations
89