Inventor
HUANG KEH-CHING
TW8 patents
Patents
8 patentsUS6010968AJan 4, 2000
Method for forming a contact opening with multilevel etching
UNITED MICROELECTRONICS CORP21 citations92
US6218239B1Apr 17, 2001
Manufacturing method of a bottom plate
UNITED MICROELECTRONICS CORP17 citations82
US6187674B1Feb 13, 2001
Manufacturing method capable of preventing corrosion and contamination of MOS gate
UNITED MICROELECTRONICS CORP9 citations73
US6107131AAug 22, 2000
Method of fabricating interpoly dielectric layer of embedded dynamic random access memory
UNITED MICROELECTRONICS CORP8 citations71
US6060349AMay 9, 2000
Planarization on an embedded dynamic random access memory
UNITED MICROELECTRONICS CORP13 citations71
US6316311B1Nov 13, 2001
Method of forming borderless contact
UNITED MICROELECTRONICS CORP4 citations62
US6184147B1Feb 6, 2001
Method for forming a high aspect ratio borderless contact hole
UNITED MICROELECTRONICS CORP5 citations62
US6306757B1Oct 23, 2001
Method for forming a multilevel interconnect
UNITED MICROELECTRONICS CORP4 citations58