Inventor
YOO DO-YUL
KR5 patents
Patents
5 patentsUS7288848B2Oct 30, 2007
Overlay mark for measuring and correcting alignment errors
SAMSUNG ELECTRONICS CO LTD7 citations72
US6841338B2Jan 11, 2005
Photoresist composition and method of forming a photoresist pattern with a controlled remnant ratio
SAMSUNG ELECTRONICS CO LTD3 citations60
US7804596B2Sep 28, 2010
Overlay key, method of forming the overlay key and method of measuring overlay accuracy using the overlay key
SAMSUNG ELECTRONICS CO LTD6 citations58
US7732105B2Jun 8, 2010
Photomask with overlay mark and method of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations54
US7236245B2Jun 26, 2007
Overlay key with a plurality of crossings and method of measuring overlay accuracy using the same
SAMSUNG ELECTRONICS CO LTD0 citations47