Inventor

HOEFNAGELS JOHAN CHRISTIAAN GE

NL2 patents

Patents

2 patents

US7352439B2Apr 1, 2008

Lithography system, control system and device manufacturing method

ASML NETHERLANDS BV10 citations81

US7116398B2Oct 3, 2006

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV2 citations55