Inventor
MAKABE MARIKO
JP4 patents
Patents
4 patentsUS6603179B2Aug 5, 2003
Semiconductor apparatus including CMOS circuits and method for fabricating the same
NEC ELECTRONICS CORP17 citations81
US6614081B2Sep 2, 2003
High-performance MOS transistor of LDD structure having a gate insulating film with a nitride central portion and oxide end portions
NEC ELECTRONICS CORP10 citations71
US6794258B2Sep 21, 2004
High-performance MOS transistor of LDD structure having a gate insulating film with a nitride central portion and oxide end portions
NEC ELECTRONICS CORP3 citations60
US7776686B2Aug 17, 2010
Method of fabricating a non-volatile memory element including nitriding and oxidation of an insulating film
NEC ELECTRONICS CORP0 citations49