Inventor
TAKANO AKEMI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “TAKANO AKEMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI HEAVY IND LTD
7 patentsUS6307146B1Oct 23, 2001
Amorphous silicon solar cell
MITSUBISHI HEAVY IND LTD39 citations89
US7205034B2Apr 17, 2007
Method and device for generating uniform high-frequency plasma over large surface area used for plasma chemical vapor deposition apparatus
MITSUBISHI HEAVY IND LTD38 citations88
US7319295B2Jan 15, 2008
High-frequency power supply structure and plasma CVD device using the same
MITSUBISHI HEAVY IND LTD15 citations83
US6363881B2Apr 2, 2002
Plasma chemical vapor deposition apparatus
MITSUBISHI HEAVY IND LTD19 citations83
US9733200B2Aug 15, 2017
Defect judging device, radiography system, and defect judging method
MITSUBISHI HEAVY IND LTD2 citations66
US7956999B2Jun 7, 2011
Resistivity testing method and device therefor
MITSUBISHI HEAVY IND LTD3 citations62
US7906365B2Mar 15, 2011
Method of manufacturing solar cell panel
MITSUBISHI HEAVY IND LTD6 citations55