Inventor

YEH EDWARD K

US2 patents

⚠️ This page may combine multiple inventors who share the name “YEH EDWARD K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PHILIPS ELECTRONICS NA

1 patent

US6342428B1Jan 29, 2002

Method for a consistent shallow trench etch profile

PHILIPS ELECTRONICS NA28 citations90

VLSI TECHNOLOGY INC

1 patent

US6207565B1Mar 27, 2001

Integrated process for ashing resist and treating silicon after masked spacer etch

VLSI TECHNOLOGY INC22 citations90