Inventor · disambiguated record
Rex Frost
Also filed as: FROST REX · FROST REX K
4 granted patents·2 pending applications·58 citations·filing 2003–2004
76Inventor score
Top patents by PatentIndex Score
6 records- 0188US6968532B2Multiple exposure technique to pattern tight contact geometriesINTEL CORP·Filed 2003·Granted Nov 22, 2005·39 cites·25 claims
- 0261US6977219B2Solvent vapor-assisted plasticization of photoresist films to achieve critical dimension reduction during temperature reflowINTEL CORP·Filed 2003·Granted Dec 20, 2005·8 cites·30 claims
- 0360US7258965B2Pre-exposure of patterned photoresist films to achieve critical dimension reduction during temperature reflowINTEL CORP·Filed 2003·Granted Aug 21, 2007·6 cites·25 claims
- 0457US7288344B2Accommodating diffraction in the printing of features on a substrateINTEL CORP·Filed 2003·Granted Oct 30, 2007·5 cites·29 claims
- 0536US2005255411A1Multiple exposure and shrink to achieve reduced dimensionsFROST REX·Filed 2004·Application pending·0 cites
- 0625US2006046183A1Photoresist formulation with surfactant additiveYUEH WANG·Filed 2004·Application pending·0 cites
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