Inventor

WAKABAYASHI HIROMI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “WAKABAYASHI HIROMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOMATSU ELECTRIC METALS CO LTD

1 patent

US5866477AFeb 2, 1999

Method of polishing a chamfered portion of a semiconductor silicon substrate

KOMATSU ELECTRIC METALS CO LTD20 citations85

SUMCO TECHXIV CORP

1 patent

US7303691B2Dec 4, 2007

Polishing method for semiconductor wafer

SUMCO TECHXIV CORP6 citations56