Inventor
AOYAMA TAKAYUKI
JP29 patents
⚠️ This page may combine multiple inventors who share the name “AOYAMA TAKAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
18 patentsUS9741576B2Aug 22, 2017
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD6 citations83
US10028336B2Jul 17, 2018
Semiconductor manufacturing method and semiconductor manufacturing apparatus
SCREEN HOLDINGS CO LTD3 citations73
US10978319B2Apr 13, 2021
Light-irradiation heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD1 citations72
US10446397B2Oct 15, 2019
Thermal processing method through light irradiation
SCREEN HOLDINGS CO LTD3 citations72
US10121683B2Nov 6, 2018
Light-irradiation heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD3 citations72
US11574824B2Feb 7, 2023
Heat treatment method including low temperature degassing before flash lamp anneal and heat treatment apparatus thereof
SCREEN HOLDINGS CO LTD0 citations62
US11335574B2May 17, 2022
Light-irradiation type thermal processing method and thermal processing apparatus
SCREEN HOLDINGS CO LTD0 citations62
US10985021B2Apr 20, 2021
Method for fabricating p-type gallium nitride semiconductor and method of heat treatment
SCREEN HOLDINGS CO LTD0 citations62
US10886132B2Jan 5, 2021
Manufacturing method of high-dielectric-constant gate insulating film of semiconductor device
SCREEN HOLDINGS CO LTD0 citations62
US10790171B2Sep 29, 2020
Light-irradiation heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD1 citations62
US10643850B2May 5, 2020
Dopant introduction method and thermal treatment method
SCREEN HOLDINGS CO LTD1 citations62
US10580667B2Mar 3, 2020
Light-irradiation heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD1 citations61
US11516884B2Nov 29, 2022
Light irradiation type heat treatment method and heat treatment apparatus that calculates a temperature of a substrate based on a treatment recipe applicable thereto
SCREEN HOLDINGS CO LTD0 citations60
US9769880B2Sep 19, 2017
Semiconductor manufacturing method and semiconductor manufacturing apparatus
SCREEN HOLDINGS CO LTD0 citations52
US10453715B2Oct 22, 2019
Light-irradiation type thermal processing method and thermal processing apparatus
SCREEN HOLDINGS CO LTD0 citations51
US10424483B2Sep 24, 2019
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations51
US10181404B2Jan 15, 2019
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations51
US11621178B2Apr 4, 2023
Light irradiation type heat treatment apparatus including oxygen analyzer and heat treatment method thereof
SCREEN HOLDINGS CO LTD0 citations45