Inventor
KAWARAZAKI HIKARU
JP22 patents
Patents
22 patentsUS9741576B2Aug 22, 2017
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD6 citations83
US9557110B2Jan 31, 2017
Method and apparatus for heat-treating high dielectric constant film
SCREEN HOLDINGS CO LTD7 citations83
US10354894B2Jul 16, 2019
Light-irradiation heat treatment apparatus
SCREEN HOLDINGS CO LTD2 citations73
US10978319B2Apr 13, 2021
Light-irradiation heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD1 citations72
US10903126B2Jan 26, 2021
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD2 citations72
US10658250B2May 19, 2020
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD4 citations72
US10446397B2Oct 15, 2019
Thermal processing method through light irradiation
SCREEN HOLDINGS CO LTD3 citations72
US10121683B2Nov 6, 2018
Light-irradiation heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD3 citations72
US12219670B2Feb 4, 2025
Light-irradiation heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations62
US11574824B2Feb 7, 2023
Heat treatment method including low temperature degassing before flash lamp anneal and heat treatment apparatus thereof
SCREEN HOLDINGS CO LTD0 citations62
US11089657B2Aug 10, 2021
Light-irradiation heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations62
US10790171B2Sep 29, 2020
Light-irradiation heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD1 citations62
US10777415B2Sep 15, 2020
Heat treatment method for dopant introduction
SCREEN HOLDINGS CO LTD1 citations62
US10573569B2Feb 25, 2020
Thermal processing apparatus and thermal processing method through light irradiation
SCREEN HOLDINGS CO LTD1 citations62
US9966254B2May 8, 2018
Method and apparatus for heat-treating high dielectric constant film
SCREEN HOLDINGS CO LTD1 citations62
US9837266B2Dec 5, 2017
Method and apparatus for heat-treating high dielectric constant film
SCREEN HOLDINGS CO LTD1 citations62
US10580667B2Mar 3, 2020
Light-irradiation heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD1 citations61
US12575354B2Mar 10, 2026
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations51
US10424483B2Sep 24, 2019
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations51
US10181404B2Jan 15, 2019
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations51
US12550665B2Feb 10, 2026
Temperature measurement method and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations50
US11430676B2Aug 30, 2022
Heat treatment method of light irradiation type
SCREEN HOLDINGS CO LTD0 citations48