Inventor
FUSE KAZUHIKO
JP48 patents
⚠️ This page may combine multiple inventors who share the name “FUSE KAZUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
40 patentsUS9805932B2Oct 31, 2017
Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light
SCREEN HOLDINGS CO LTD5 citations84
US9741576B2Aug 22, 2017
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD6 citations83
US10276385B2Apr 30, 2019
Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light
SCREEN HOLDINGS CO LTD2 citations73
US10121664B2Nov 6, 2018
Dopant introduction method and heat treatment method
SCREEN HOLDINGS CO LTD4 citations73
US11881420B2Jan 23, 2024
Light-irradiation thermal treatment apparatus
SCREEN HOLDINGS CO LTD2 citations72
US11798823B2Oct 24, 2023
Light irradiation type thermal process apparatus using a gas ring
SCREEN HOLDINGS CO LTD3 citations72
US10978319B2Apr 13, 2021
Light-irradiation heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD1 citations72
US10950472B2Mar 16, 2021
Light-irradiation thermal treatment apparatus
SCREEN HOLDINGS CO LTD2 citations72
US10347512B2Jul 9, 2019
Method and apparatus for light-irradiation heat treatment
SCREEN HOLDINGS CO LTD2 citations72
US10121683B2Nov 6, 2018
Light-irradiation heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD3 citations72
US9799517B2Oct 24, 2017
Apparatus and method for light-irradiation heat treatment
SCREEN HOLDINGS CO LTD4 citations72
US11476167B2Oct 18, 2022
Heat treatment method and heat treatment apparatus of light irradiation type
SCREEN HOLDINGS CO LTD4 citations71
US11322375B2May 3, 2022
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD2 citations71
US10643869B2May 5, 2020
Light irradiation type heat treatment apparatus and heat treatment method
SCREEN HOLDINGS CO LTD3 citations71
US11574824B2Feb 7, 2023
Heat treatment method including low temperature degassing before flash lamp anneal and heat treatment apparatus thereof
SCREEN HOLDINGS CO LTD0 citations62
US11024524B2Jun 1, 2021
Heat treatment method and heat treatment apparatus for managing dummy wafer
SCREEN HOLDINGS CO LTD0 citations62
US11024521B2Jun 1, 2021
Heat treatment method for managing dummy wafer
SCREEN HOLDINGS CO LTD0 citations62
US10790171B2Sep 29, 2020
Light-irradiation heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD1 citations62
US10777415B2Sep 15, 2020
Heat treatment method for dopant introduction
SCREEN HOLDINGS CO LTD1 citations62
US10643850B2May 5, 2020
Dopant introduction method and thermal treatment method
SCREEN HOLDINGS CO LTD1 citations62
US10636676B2Apr 28, 2020
Heat treatment method and heat treatment apparatus of light irradiation type
SCREEN HOLDINGS CO LTD1 citations62
US10573569B2Feb 25, 2020
Thermal processing apparatus and thermal processing method through light irradiation
SCREEN HOLDINGS CO LTD1 citations62
US12341031B2Jun 24, 2025
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations61
US12057352B2Aug 6, 2024
Heat treatment method and heat treatment apparatus of light irradiation type
SCREEN HOLDINGS CO LTD0 citations61
US11901200B2Feb 13, 2024
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations61
US11282708B2Mar 22, 2022
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations61
US10580667B2Mar 3, 2020
Light-irradiation heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD1 citations61
US12160936B2Dec 3, 2024
Heat treatment apparatus of light irradiation type and method for cleaning heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations52
US11764100B2Sep 19, 2023
Heat treatment susceptor and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations52
US11004693B2May 11, 2021
Light-irradiation heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations52
US10879072B2Dec 29, 2020
Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light
SCREEN HOLDINGS CO LTD0 citations52
US10153184B2Dec 11, 2018
Light irradiation type heat treatment apparatus
SCREEN HOLDINGS CO LTD1 citations52
US12283498B2Apr 22, 2025
Light irradiation type heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations51
US12020958B2Jun 25, 2024
Light irradiation type heat treatment method
SCREEN HOLDINGS CO LTD0 citations51
US11908703B2Feb 20, 2024
Light irradiation type heat treatment method
SCREEN HOLDINGS CO LTD0 citations51
US11289344B2Mar 29, 2022
Heat treatment method and heat treatment apparatus for managing dummy wafer
SCREEN HOLDINGS CO LTD0 citations51
US10424483B2Sep 24, 2019
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations51
US10181404B2Jan 15, 2019
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations51
US10128135B2Nov 13, 2018
Heat treatment method and heat treatment device
SCREEN HOLDINGS CO LTD0 citations42
US10784127B2Sep 22, 2020
Method of adjusting measurement position of radiation thermometer and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations39
FUSE KAZUHIKO
3 patentsUS9343313B2May 17, 2016
Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light
FUSE KAZUHIKO11 citations83
US8664116B2Mar 4, 2014
Heat treatment method for growing silicide
FUSE KAZUHIKO12 citations83
US8623750B2Jan 7, 2014
Heat treatment method for promoting crystallization of high dielectric constant film
FUSE KAZUHIKO8 citations83