Inventor
TANIMURA Hideaki
JP18 patents
Patents
18 patentsUS9741576B2Aug 22, 2017
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD6 citations83
US10121664B2Nov 6, 2018
Dopant introduction method and heat treatment method
SCREEN HOLDINGS CO LTD4 citations73
US10978319B2Apr 13, 2021
Light-irradiation heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD1 citations72
US10347512B2Jul 9, 2019
Method and apparatus for light-irradiation heat treatment
SCREEN HOLDINGS CO LTD2 citations72
US10121683B2Nov 6, 2018
Light-irradiation heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD3 citations72
US9799517B2Oct 24, 2017
Apparatus and method for light-irradiation heat treatment
SCREEN HOLDINGS CO LTD4 citations72
US12219670B2Feb 4, 2025
Light-irradiation heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations62
US11574824B2Feb 7, 2023
Heat treatment method including low temperature degassing before flash lamp anneal and heat treatment apparatus thereof
SCREEN HOLDINGS CO LTD0 citations62
US11089657B2Aug 10, 2021
Light-irradiation heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations62
US10985021B2Apr 20, 2021
Method for fabricating p-type gallium nitride semiconductor and method of heat treatment
SCREEN HOLDINGS CO LTD0 citations62
US10790171B2Sep 29, 2020
Light-irradiation heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD1 citations62
US10777415B2Sep 15, 2020
Heat treatment method for dopant introduction
SCREEN HOLDINGS CO LTD1 citations62
US10643850B2May 5, 2020
Dopant introduction method and thermal treatment method
SCREEN HOLDINGS CO LTD1 citations62
US10580667B2Mar 3, 2020
Light-irradiation heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD1 citations61
US12283498B2Apr 22, 2025
Light irradiation type heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations51
US10699906B2Jun 30, 2020
Heat treatment method for p-type semiconductor
SCREEN HOLDINGS CO LTD0 citations51
US10424483B2Sep 24, 2019
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations51
US10181404B2Jan 15, 2019
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations51