Inventor · disambiguated record
Henry Yun
Also filed as: YUN HENRY · YUN HENRY K
4 granted patents·2 pending applications·20 citations·filing 2002–2008
72Inventor score
Top patents by PatentIndex Score
6 records- 0183US7763399B2Removal of ionic residues or oxides and prevention of photo-induced defects, ionic crystal or oxide growth on photolithographic surfacesINTEL CORP·Filed 2007·Granted Jul 27, 2010·10 cites·16 claims
- 0271US7851109B2Low stress pellicle frames and reticle pellicle assembliesINTEL CORP·Filed 2008·Granted Dec 14, 2010·3 cites·20 claims
- 0364US7901847B2Use of soft adhesive to attach pellicle to reticleINTEL CORP·Filed 2008·Granted Mar 8, 2011·2 cites·18 claims
- 0448US6895157B2Thermal optical switch apparatus and methods with enhanced thermal isolationINTEL CORP·Filed 2002·Granted May 17, 2005·5 cites·27 claims
- 0539US2008241711A1Removal and prevention of photo-induced defects on photomasks used in photolithographyYUN HENRY K·Filed 2007·Application pending·0 cites
- 0633US2009098469A1Process for fabrication of alternating phase shift masksCHAKRAVORTY KISHORE K·Filed 2007·Application pending·0 cites
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