Inventor
TAOKA HIRONOBU
JP14 patents
⚠️ This page may combine multiple inventors who share the name “TAOKA HIRONOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
7 patentsUS6343370B1Jan 29, 2002
Apparatus and process for pattern distortion detection for semiconductor process and semiconductor device manufactured by use of the apparatus or process
MITSUBISHI ELECTRIC CORP84 citations97
US6350977B2Feb 26, 2002
Pattern distortion detecting method and apparatus and recording medium for pattern distortion detection
MITSUBISHI ELECTRIC CORP19 citations92
US6088520AJul 11, 2000
Method of producing highly precise charged beam drawing data divided into plurality of drawing fields
MITSUBISHI ELECTRIC CORP25 citations91
US5812412ASep 22, 1998
Charged beam pattern data generating method and a charged beam pattern data generating apparatus
MITSUBISHI ELECTRIC CORP24 citations90
US6271852B1Aug 7, 2001
boundary processing of oblique overlapping graphics to achieve dimensionally accurate electron beam irradiation
MITSUBISHI ELECTRIC CORP19 citations82
US6427225B1Jul 30, 2002
Method and apparatus for verification of a circuit layout
MITSUBISHI ELECTRIC CORP11 citations68
US5796408AAug 18, 1998
Charged particle beam drawing data production apparatus and charged particle beam drawing system
MITSUBISHI ELECTRIC CORP3 citations61
TAOKA HIRONOBU
4 patentsUS8103977B2Jan 24, 2012
Semiconductor device and its manufacturing method, semiconductor manufacturing mask, and optical proximity processing method
TAOKA HIRONOBU15 citations90
US8458627B2Jun 4, 2013
Semiconductor device including logic circuit having areas of different optical proximity accuracy
TAOKA HIRONOBU3 citations60
US8930857B2Jan 6, 2015
Mask data verification apparatus, design layout verification apparatus, method thereof, and computer program thereof
TAOKA HIRONOBU1 citations50
US8464192B2Jun 11, 2013
Lithography verification apparatus and lithography simulation program
TAOKA HIRONOBU0 citations39